Description

EXCIMER LASER 248nm UV KrF Maximum single pulse energy 800mJ

 

Features:

Pulse energy up to 800mJ
Adopt magnetic booster excitation circuit design to extend the life of thyratron
Built-in energy feedback system, good energy stability
Internal trigger/External trigger
Support dual wavelength customization

Technical Parameters:

Medium Gas:KrF
Wavelength (nm):248nm UV Laser
Maximum single pulse energy (mJ):800mJ
Maximum average power (W):33W
Maximum repetition frequency (Hz):50
Pulse Width (FWHM, ns): 25-30
Spot Size (mm)(V*H): (26+1) x (9+1)
Energy Stability (sigma,%) – 0.75 (248nm measured at output)
Divergence angle:~3×1
Cooling method – Cold
Interactive Method – Control system; RS232 (LCD screen/PC) / External Trigger: Electric Signal

Applications:

Laser deposited thin films/Fine processing/Material surface treatment/Laser annealing